@article {, title = {Plasma diagnostics and devices properties of AlGaN/GaN HEMT passivated with SiN deposited by plasma-enhanced Chemicals vapour deposition}, journal = {Journal of Physics }, volume = {43}, year = {2010}, month = {2010}, pages = {1-8}, issn = {1088-0022}, doi = {10.1088/0022-3727/43/49/495202}, author = {E. Mu{\~n}oz and M. F. Romero and M.M. Sanz and I. Tanarro and A. Jim{\'e}nez} }