TY - JOUR T1 - Plasma diagnostics and devices properties of AlGaN/GaN HEMT passivated with SiN deposited by plasma-enhanced Chemicals vapour deposition JF - Journal of Physics Y1 - 2010 A1 - E. Muñoz A1 - M. F. Romero A1 - M.M. Sanz A1 - I. Tanarro A1 - A. Jiménez VL - 43 IS - 49 ER -